Chip Low Temperature Test Stand	Lithography machine system cooling

Micro Magnetic Gear Pumps for Semiconductor Manufacturing | Precision Thermal Management Solutions

1. Precision Fluid Handling for Advanced Semiconductor Applications

In semiconductor manufacturing, where nanometer-scale accuracy and extreme environmental control are crucial, our micro magnetic gear pumps deliver unmatched performance in thermal management and process reliability. Our pumps ensure contamination-free, precise, and vibration-free fluid transfer to support  semiconductor production.

2. Key Semiconductor Applications

✅ Lithography System Cooling
EUV and DUV lithography systems require exceptional thermal stability to maintain optical alignment and minimize thermal drift. Suofu's micro magnetic gear pumps provide pulse-free circulation of dielectric coolants, achieving temperature control within ±0.1°C. Our magnetic drive mechanism eliminates mechanical vibration, preventing disturbance to sensitive optical components. This stability directly supports overlay accuracy and defect reduction in wafer patterning processes.

✅ Chip Cryogenic Test Benches
Semiconductor characterization at cryogenic temperatures demands reliable fluid handling without performance degradation. Our pumps circulate cooling fluids at temperatures as low as -120°C while maintaining consistent flow rates. The pumps' advanced material compatibility ensures operational integrity in automated probe stations and testing setups, enabling accurate device characterization across extreme temperature ranges.

3. Why Our Pumps Are Ideal for Semiconductor?

✅ Vibration-Free Operation: Precision-molded gears and magnetic drive eliminate mechanical vibration, critical for metrology and fine alignment.

✅ Ultra-Clean Materials: Full fluid path compatibility with high-purity coolants; optional ceramic and PEEK fluid contacts to prevent ionic contamination.

✅ Thermal Stability: Performance-tested across wide temperature ranges (-120°C to 150°C) without degradation in flow accuracy.

✅ Pulse-Free Flow: Proprietary gear design ensures smooth fluid delivery, avoiding temperature spikes or drops.

✅ Sealless and Leak-Free: Hermetically sealed magnetic drive eliminates risk of fluid leakage or external particle ingress.

4. Enable Higher Yields with Reliable Fluid Control

Whether integrated into EUV lithography scanners, wafer inspection equipment, or cryogenic testers, our micro magnetic gear pumps provide the precision and reliability needed at the heart of advanced semiconductor manufacturing processes.

Contact us to discuss your thermal management or precision dosing requirements—our engineering team specializes in custom solutions for semiconductor equipment manufacturers.

5.FAQ

✅ Why use magnetic gear pumps instead of centrifugal pumps in cryogenic testing?  

• Magnetic gear pumps maintain stable flow rates despite viscosity changes at low temperatures, while centrifugal pumps experience significant performance variations. The sealed design also prevents atmospheric moisture condensation in cryogenic environments.

✅ What are your cooperation models? Can you provide OEM/ODM services?

• Our international cooperation model primarily involves developing agents or distributors in countries or regions. We sign agency agreements, provide product training and pricing, and do not engage in direct sales. Relevant inquiries are forwarded to agents for follow-up. In countries or regions without established agents, we operate primarily through direct sales.

• We can provide OEM/ODM services.